Participants pose for a photo at the MOU signing ceremony for the development of plasma-resistance characteristic data for ceramic materials and components used in plasma processes, and the establishment of an AI-based joint research and utilization platform. [Korea Institute of Fusion Energy]
Participants pose for a photo at the MOU signing ceremony for the development of plasma-resistance characteristic data for ceramic materials and components used in plasma processes, and the establishment of an AI-based joint research and utilization platform. [Korea Institute of Fusion Energy]

The Korea Institute of Fusion Energy signed an MOU Monday with the Korea Institute of Ceramic Engineering and Technology to develop plasma-resistance characteristic data for ceramic materials and components used in plasma processes and to build an AI-based joint research and utilization platform.

The agreement aims to systematically collect data on the plasma durability and reaction characteristics of ceramic materials and components used in semiconductor and display manufacturing, and to establish a cooperative framework for standardizing and sharing that data.

Plasma technology is a core technology underpinning nuclear fusion power generation, which is expected to resolve humanity's energy challenges. As the fourth state of matter — beyond solid, liquid and gas — plasma enables the precise redesign of materials through atomic-level reactions, making it a foundational technology for advanced industries.

In semiconductor and display manufacturing, plasma is repeatedly used to etch or deposit materials. During this process, ceramic materials and components inside process equipment are exposed to high-energy plasma for extended periods, making it critical to evaluate and predict how stably those materials maintain their performance.

The plasma-resistance characteristics of ceramic materials and components are closely tied to process stability, equipment lifespan and product quality. There is growing demand for a data-driven evaluation framework that can systematically accumulate and objectively compare how materials react and change under plasma conditions.

The two institutions plan to cooperate on three fronts: securing ceramic plasma-resistance characteristic data and building a data-based joint utilization platform; identifying and pursuing joint research projects on ceramic materials and components; and sharing research data and information while jointly utilizing research infrastructure.

Through this collaboration, they plan to pursue registration of national reference standards for the plasma-resistance characteristics of ceramic materials and components through the National Reference Standard Center under the Korean Agency for Technology and Standards. They also plan to develop an evaluation and analysis framework applicable to semiconductor and display industry settings by leveraging AI-based analytical technology.

Oh Young-kook, president of the Korea Institute of Fusion Energy, said reliable material data and an evaluation foundation are essential for advancing plasma processes and strengthening the competitiveness of advanced manufacturing industries. "We will build on this collaboration to advance AI-based data utilization technology and contribute to innovation and technological competitiveness in the advanced materials and components industry," he said.


nbgkoo@heraldcorp.com